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High-temperature stability of epitaxial, non-isostructural Mo/NbN superlattices
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Northwestern Univ, Advanced Coating Technol Grp, Evanston, IL 60201 USA Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL USA Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden Univ Calif Los Alamos Natl Lab, Los Alamos, NM USA.
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2000 (English)In: Journal of Materials Research, ISSN 0884-2914, Vol. 15, no 2, 554-559 p.Article in journal (Refereed) Published
Abstract [en]

The effect of 1000 degrees C vacuum annealing on the structure and hardness of epitaxial Mo/NbN superlattice thin films was studied. The intensity of superlattice satellite peaks, measured by x-ray diffraction, decreased during annealing while new peaks corresponding to a MoNbN ternary phase appeared. The results are consistent with the Mo-Nb-N phase diagram, which shows no mutual solubility between Mo, NbN, and MoNbN. Even after 3-h anneals and a loss of most of the superlattice peak intensity, the room-temperature hardness was the same as for as-deposited superlattices, The retained hardness suggests that a residual nanocomposite structure is retained even after the formation of the ternary structure.

Place, publisher, year, edition, pages
2000. Vol. 15, no 2, 554-559 p.
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-49861OAI: diva2:270757
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2016-08-31

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