High-temperature stability of epitaxial, non-isostructural Mo/NbN superlattices
2000 (English)In: Journal of Materials Research, ISSN 0884-2914, Vol. 15, no 2, 554-559 p.Article in journal (Refereed) Published
The effect of 1000 degrees C vacuum annealing on the structure and hardness of epitaxial Mo/NbN superlattice thin films was studied. The intensity of superlattice satellite peaks, measured by x-ray diffraction, decreased during annealing while new peaks corresponding to a MoNbN ternary phase appeared. The results are consistent with the Mo-Nb-N phase diagram, which shows no mutual solubility between Mo, NbN, and MoNbN. Even after 3-h anneals and a loss of most of the superlattice peak intensity, the room-temperature hardness was the same as for as-deposited superlattices, The retained hardness suggests that a residual nanocomposite structure is retained even after the formation of the ternary structure.
Place, publisher, year, edition, pages
2000. Vol. 15, no 2, 554-559 p.
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-49861OAI: oai:DiVA.org:liu-49861DiVA: diva2:270757