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Micromachined twin gas sensor for CO and O2 quantification based on catalytically modified nano-SnO2
Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain, Imperial College of London, Department of Materials, Dr. Molly M. Stevens Lab., Exhibition Road, London SW7 2AZ, United Kingdom, Department of Materials, Imperial College, London.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain.
Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain.
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2006 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, E-ISSN 1873-3077, Vol. 114, no 2, 881-892 p.Article in journal (Refereed) Published
Abstract [en]

In this work we present a micromachined twin sensor that can distinguish between carbon monoxide (CO) and O2 gas taking advantage of the high sensitivity of SnO2 to these gases. The SnO2 nanoparticles of both sensors are catalytically modified with different Pd loadings that act as active filters. In this way, one sensor response is turned to present a higher sensitivity to CO than to O2, whereas the other sensor is mainly turned for detecting O2 variations. The twin sensor has two membranes in the same die of micromachined silicon. Each membrane works independently from the other without any cross talk of temperature. The resistance data obtained from this twin sensor as a function of CO and O 2 concentrations is parametrized. Then, two functions are calculated for the quantification of CO/O2 gas mixtures. A comparison with commercial gas sensors is shown. © 2005 Elsevier B.V. All rights reserved.

Place, publisher, year, edition, pages
2006. Vol. 114, no 2, 881-892 p.
Keyword [en]
CO, Gas sensor, Micromachined, O2, Pd, SnO2
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-50235DOI: 10.1016/j.snb.2005.08.007OAI: oai:DiVA.org:liu-50235DiVA: diva2:271131
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-12

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Department of Physics, Chemistry and BiologyThe Institute of Technology
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