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New materials for chemical and biosensors
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .ORCID iD: 0000-0002-2817-3574
School of Science and Engineering, Ishinomaki Senshu University, Ishinomaki, Miyagi, Japan.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .
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2006 (English)In: Materials and Manufacturing Processes, ISSN 1042-6914, Vol. 21, no 3, 253-256 p.Article in journal (Refereed) Published
Abstract [en]

Wide band gap materials such as SiC, AlN, GaN, ZnO, and diamond have excellent properties such as high operation temperature when used as field effect devices and a high resonating frequency of the substrate materials used in piezoelectric resonator devices. Integration of FET and resonating sensors on the same chip enables powerful miniaturized devices, which can deliver increased information about a gas mixture or complex liquid. Examples of sensor devices based on different wide band gap materials will be given.

Place, publisher, year, edition, pages
2006. Vol. 21, no 3, 253-256 p.
Keyword [en]
AlN, Biosensors, Catalytic metals, Chemical sensors, Diamond, FET, GaN, High frequency, High temperature, Resonators, SAW, SiC, Thin film, Wide band gap materials, ZnO
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-50293DOI: 10.1080/10426910500464495OAI: oai:DiVA.org:liu-50293DiVA: diva2:271189
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2014-01-09

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Lloyd-Spets, AnitaWingbrant, HelenaAndersson, MikeSalomonsson, AnetteUvdal, KajsaYakimova, Rositsa

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Lloyd-Spets, AnitaWingbrant, HelenaAndersson, MikeSalomonsson, AnetteUvdal, KajsaYakimova, Rositsa
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