New materials for chemical and biosensors
2006 (English)In: Materials and Manufacturing Processes, ISSN 1042-6914, Vol. 21, no 3, 253-256 p.Article in journal (Refereed) Published
Wide band gap materials such as SiC, AlN, GaN, ZnO, and diamond have excellent properties such as high operation temperature when used as field effect devices and a high resonating frequency of the substrate materials used in piezoelectric resonator devices. Integration of FET and resonating sensors on the same chip enables powerful miniaturized devices, which can deliver increased information about a gas mixture or complex liquid. Examples of sensor devices based on different wide band gap materials will be given.
Place, publisher, year, edition, pages
2006. Vol. 21, no 3, 253-256 p.
AlN, Biosensors, Catalytic metals, Chemical sensors, Diamond, FET, GaN, High frequency, High temperature, Resonators, SAW, SiC, Thin film, Wide band gap materials, ZnO
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-50293DOI: 10.1080/10426910500464495OAI: oai:DiVA.org:liu-50293DiVA: diva2:271189