Localized 56Fe+ ion implantation of TiO2 using anodic porous alumina
2009 (English)In: Ion Beams and Nano-Engineering / [ed] D. Ila, P.K. Chu, N. Kishimoto, J.K.N. Lindner and J. Baglin, Warrendale, PA, USA: Materials Research Society , 2009, 3-8 p.Conference paper (Refereed)
We present result following localized ion implantation of rutile titanium dioxide (TiO2) using anodic porous alumina as a mask. The implantation were performed with 100 keV 56Fe+ ions using a fluence of 1.3·1016 ions/cm2. The surface modifications where studied by means of SEM, AFM/MFM and XRD. A well-defined hexagonal pattern of modified material in the near surface structure is observed. Local examination of the implanted areas revealed no clear magnetic signal. However, a variation in mechanical and electrostatic behavior between implanted and non-implanted zones is inferred from the variation in AFM signals.
Place, publisher, year, edition, pages
Warrendale, PA, USA: Materials Research Society , 2009. 3-8 p.
, Materials Research Society Symposium Proceedings, 1181
ion implantation, porous alumina membrane, MFM, titanium dioxide, rutile, magnetic patterning
National CategorySubatomic Physics Condensed Matter Physics
IdentifiersURN: urn:nbn:se:liu:diva-53173DOI: 10.1557/PROC-1181-DD01-04ISBN: 978-160511154-4OAI: oai:DiVA.org:liu-53173DiVA: diva2:287410
2009 MRS Spring Meeting; San Francisco, CA; United States