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Localized 56Fe+ ion implantation of TiO2 using anodic porous alumina
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Instituto de Ciencia de Materiales de Madrid, CSIC, 28043 Madrid, Spain.
Instituto de Ciencia de Materiales de Madrid, CSIC, 28043 Madrid, Spain.
Applied Physics Department, Universidad Autónoma de Madrid, 28043 Madrid, Spain.
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2009 (English)In: Ion Beams and Nano-Engineering / [ed] D. Ila, P.K. Chu, N. Kishimoto, J.K.N. Lindner and J. Baglin, Warrendale, PA, USA: Materials Research Society , 2009, 3-8 p.Conference paper, Published paper (Refereed)
Abstract [en]

We present result following localized ion implantation of rutile titanium dioxide (TiO2) using anodic porous alumina as a mask. The implantation were performed with 100 keV 56Fe+ ions using a fluence of 1.3·1016 ions/cm2. The surface modifications where studied by means of SEM, AFM/MFM and XRD. A well-defined hexagonal pattern of modified material in the near surface structure is observed. Local examination of the implanted areas revealed no clear magnetic signal. However, a variation in mechanical and electrostatic behavior between implanted and non-implanted zones is inferred from the variation in AFM signals.

Place, publisher, year, edition, pages
Warrendale, PA, USA: Materials Research Society , 2009. 3-8 p.
Series
Materials Research Society Symposium Proceedings, 1181
Keyword [en]
ion implantation, porous alumina membrane, MFM, titanium dioxide, rutile, magnetic patterning
National Category
Subatomic Physics Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-53173DOI: 10.1557/PROC-1181-DD01-04ISBN: 978-160511154-4 (print)OAI: oai:DiVA.org:liu-53173DiVA: diva2:287410
Conference
2009 MRS Spring Meeting; San Francisco, CA; United States
Available from: 2010-01-18 Created: 2010-01-18 Last updated: 2014-10-02

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Jensen, Jens

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
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  • Other style
More styles
Language
  • de-DE
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  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
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Output format
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  • asciidoc
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