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Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching
Cinvestav-Querétaro, Mexico.
Linköping University, Department of Physics, Chemistry and Biology, Applied Optics . Linköping University, The Institute of Technology.ORCID iD: 0000-0003-2749-8008
Linköping University, Department of Physics, Chemistry and Biology, Applied Optics . Linköping University, The Institute of Technology.ORCID iD: 0000-0001-9229-2028
National Taipei University of Technology.
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2009 (English)Conference paper, Published paper (Other academic)
Place, publisher, year, edition, pages
2009. 35-35 p.
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-53704OAI: oai:DiVA.org:liu-53704DiVA: diva2:291312
Conference
5th Workshop Ellipsometry, Zweibrücken, Germany
Available from: 2010-02-01 Created: 2010-02-01 Last updated: 2013-10-14

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Järrendahl, KennethArwin, Hans

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CiteExportLink to record
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