Characterization of worn Ti-Si cathodes used for reactive cathodic arc evaporation
2010 (English)In: JOURNAL OF VACUUM SCIENCE and TECHNOLOGY A, ISSN 0734-2101, Vol. 28, no 2, 347-353 p.Article in journal (Refereed) Published
The microstructural evolution of Ti1-xSix cathode surfaces (x=0, 0.1, 0.2) used in reactive cathodic arc evaporation has been investigated by analytical electron microscopy and x-ray diffractometry. The results show that the reactive arc operated in N-2 atmosphere induces a 2-12 mu m thick N-containing converted layer consisting of nanosized grains in the two-phase Ti and Ti5Si3 cathode surface. The formation mechanism of this layer is proposed to be surface nitriding and redeposition of macroparticles formed during the deposition process. The surface roughness of the worn Ti1-xSix cathodes increases with increasing Si content, up to 20 at. %, due to preferential erosion of Ti5Si3.
Place, publisher, year, edition, pages
2010. Vol. 28, no 2, 347-353 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-54604DOI: 10.1116/1.3330767ISI: 000275515000029OAI: oai:DiVA.org:liu-54604DiVA: diva2:305997
Jianqiang Zhu, Anders Eriksson, Naureen Ghafoor, M P Johansson, J Sjolen, Lars Hultman, Johanna Rosén and Magnus Odén, Characterization of worn Ti-Si cathodes used for reactive cathodic arc evaporation, 2010, JOURNAL OF VACUUM SCIENCE and TECHNOLOGY A, (28), 2, 347-353.
Copyright: American Vacuum Society