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Multi-Level Pseudo-Random Signal Design and 'Model-on-Demand' Estimation Applied to Nonlinear Identification of a RTP Wafer Reactor
Linköping University, Department of Electrical Engineering, Automatic Control. Linköping University, The Institute of Technology.
Linköping University, Department of Electrical Engineering, Automatic Control. Linköping University, The Institute of Technology.
Linköping University, Department of Electrical Engineering, Automatic Control. Linköping University, The Institute of Technology.
Linköping University, Department of Electrical Engineering, Automatic Control. Linköping University, The Institute of Technology.
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1999 (English)Report (Other academic)
Abstract [en]

Guidelines are presented for specifying the design parameters of multi-level pseudo-random sequences in a manner useful for “plant-friendly” nonlinear system identification. These multi-level signals are introduced into a rapid thermal processing wafer reactor simulation and compared against a well-designed pseudo-random binary sequence (PRBS). The resulting data serves as a database for a “model on demand” (MoD) predictor. MoD estimation is attractive because it requires less engineering effort to model a nonlinear plant, compared to global nonlinear models such as neural networks. The improved fit of multi-level signals over the PRBS signal, as well as the usefulness of the MoD estimator, is demonstrated on validation data.

Place, publisher, year, edition, pages
Linköping: Linköping University Electronic Press, 1999. , 5 p.
Series
LiTH-ISY-R, ISSN 1400-3902 ; 2156
Keyword [en]
Identification, Local polynomial modeling, Nonlinear systems, Closed loop systems
National Category
Control Engineering
Identifiers
URN: urn:nbn:se:liu:diva-55350ISRN: LiTH-ISY-R-2156OAI: oai:DiVA.org:liu-55350DiVA: diva2:316029
Available from: 2010-04-29 Created: 2010-04-29 Last updated: 2014-09-15

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Automatic ControlThe Institute of Technology
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CiteExportLink to record
Permanent link

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Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf