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Comparison of Global Nonlinear Models and "Model-on-Demand" Estimation Applied to Identification of a RTP Wafer Reactor
Arizona State University, AZ, USA.
Arizona State University, AZ, USA.
Linköping University, Department of Electrical Engineering, Automatic Control. Linköping University, The Institute of Technology.
Honeywell Technology Center, MN, USA.
1999 (English)Report (Other academic)
Abstract [en]

"Model on Demand" (MoD) simulation of the temperature dynamics in a simulated Rapid Thermal Process-ing (RTP) reactor is compared against various types of global models (ARX, semiphysical, combined semiphysical with neural net). The identication data is generated from a m-level pseudo-random sequence input whose parameters are specied systematically using a priori information readily available to the engineer. The MoD estimator outperforms the ARX model and two semi-physical models, while matching the performance of a combined semi-physical with neural net model. This makes MoD estimation an appealing alternative to global methods because of its reduced engineering eort and simplified a priori knowledge regarding model structure.

Place, publisher, year, edition, pages
Linköping: Linköping University Electronic Press, 1999. , 7 p.
LiTH-ISY-R, ISSN 1400-3902 ; 2184
Keyword [en]
Identification, Non-parametric estimation
National Category
Control Engineering
URN: urn:nbn:se:liu:diva-55353ISRN: LiTH-ISY-R-2184OAI: diva2:316031
Available from: 2010-04-29 Created: 2010-04-29 Last updated: 2014-10-06Bibliographically approved

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Automatic ControlThe Institute of Technology
Control Engineering

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ReferencesLink to record
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