Wurtzite-structure Sc1-xAlxN solid solution films grown by reactive magnetron sputter epitaxy: structural characterization and first-principles calculations
2010 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 107, no 12, 123515- p.Article in journal (Refereed) Published
AlN(0001) was alloyed with ScN with molar fractions up to ~22%, while retaining a singlecrystal wurtzite (w-) structure and with lattice parameters matching calculated values. Material synthesis was realized by magnetron sputter epitaxy of thin films starting from optimal conditions for the formation of w-AlN onto lattice-matched w-AlN seed layers on Al2O3(0001) and MgO(111) substrates. Films with ScN contents between 23% and ~50% exhibit phase separation into nanocrystalline ScN and AlN, while ScN-rich growth conditions yield a transformation to rocksalt-structure Sc1-xAlxN(111) films. The experimental results are analyzed with ion beam analysis, X-ray diffraction, and transmission electron microscopy, together with ab-initio calculations of mixing enthalpies and lattice parameters of solid solutions in wurtzite, rocksalt, and layered hexagonal phases.
Place, publisher, year, edition, pages
American Institute of Physics , 2010. Vol. 107, no 12, 123515- p.
National CategoryNatural Sciences
IdentifiersURN: urn:nbn:se:liu:diva-56272DOI: 10.1063/1.3448235ISI: 000279993900042OAI: oai:DiVA.org:liu-56272DiVA: diva2:318038
Carina Höglund, Jens Birch, Björn Alling, Javier Bareño, Zsolt Czigány, Per O. Å. Persson, Gunilla Wingqvist, Agne Zukauskaite and Lars Hultman, Wurtzite-structure Sc1-xAlxN solid solution films grown by reactive magnetron sputter epitaxy: structural characterization and first-principles calculations, 2010, Journal of Applied Physics, (107), 12, 123515.
Copyright: American Institute of Physics