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Growth and structural properties of Mg:C thin films prepared by magnetron sputtering
University of Iceland.
University Iceland.
Uppsala University.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
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2010 (English)In: THIN SOLID FILMS, ISSN 0040-6090, Vol. 518, no 15, 4225-4230 p.Article in journal (Refereed) Published
Abstract [en]

We investigate the growth and structure properties of Mg:C thin films. The films are prepared using a dc magnetron sputtering discharge where the electrical resistance over the films is monitored during growth in-situ with a four point probe setup. The structural properties of the films are investigated using X-ray diffraction measurements and the elemental composition and binding in the films is determined using elastic recoil detection analysis and X-ray photoelectron spectroscopy. The results show that during co-sputtering the carbon flux influences the initial stages of the film growth. The films are made of polycrystalline magnesium grains embedded in a carbon network, the size of which depends on the carbon content, but amorphous phases cannot be excluded. The XPS measurements show the presence of carbidic carbon whereas X-ray measurements find no Mg:C phases. The overall stability of the films is found to depend on the carbon content, where stable films capped with a 14 nm Pd layer cannot be obtained with carbon content above 18%.

Place, publisher, year, edition, pages
Elsevier Science B.V., Amsterdam. , 2010. Vol. 518, no 15, 4225-4230 p.
Keyword [en]
Magnesium, Carbon, In-situ resistance measurements, X-ray photoelectron spectroscopy, Magnetron sputtering, X-ray diffraction, Elastic recoil detection analysis
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-57379DOI: 10.1016/j.tsf.2009.12.082ISI: 000278242000028OAI: diva2:325581
Available from: 2010-06-18 Created: 2010-06-18 Last updated: 2010-06-18

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Jensen, Jens
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Department of Physics, Chemistry and BiologyThe Institute of Technology
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