Snapshot Mask-less fabrication of embedded monolithic SU-8 microstructures with arbitrary topologies
2009 (English)In: PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, ISSN 1876-6196, Vol. 1, no 1, 778-781 p.Article in journal (Refereed) Published
Microscope projection lithography offers an affordable alternative for fast prototyping of 3D polymer microstructures. Here we introduce a 3D mask-less approach operating on a routine epi-fluorescene microscope that enables the fabrication of 3D microstructures such as lenses, pillar forests, cavities and channels embedded in a monolithic SU-8 structure defined in a single exposure step. Fabrication times of about 1 hour from design to finished structure are achieved and 5 mu m resolution is possible in the present configuration.
Place, publisher, year, edition, pages
ELSEVIER SCIENCE BV , 2009. Vol. 1, no 1, 778-781 p.
SU-8 microstructures; mask-less photolithography; microlenses; microscope projection lithography; composed lenses; capped cavities
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-58425DOI: 10.1016/j.proche.2009.07.194ISI: 000275995600330OAI: oai:DiVA.org:liu-58425DiVA: diva2:343198