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Snapshot Mask-less fabrication of embedded monolithic SU-8 microstructures with arbitrary topologies
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics. Linköping University, Faculty of Science & Engineering.
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics. Linköping University, The Institute of Technology.
2009 (English)In: PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, ISSN 1876-6196, Vol. 1, no 1, 778-781 p.Article in journal (Refereed) Published
Abstract [en]

Microscope projection lithography offers an affordable alternative for fast prototyping of 3D polymer microstructures. Here we introduce a 3D mask-less approach operating on a routine epi-fluorescene microscope that enables the fabrication of 3D microstructures such as lenses, pillar forests, cavities and channels embedded in a monolithic SU-8 structure defined in a single exposure step. Fabrication times of about 1 hour from design to finished structure are achieved and 5 mu m resolution is possible in the present configuration.

Place, publisher, year, edition, pages
ELSEVIER SCIENCE BV , 2009. Vol. 1, no 1, 778-781 p.
Keyword [en]
SU-8 microstructures; mask-less photolithography; microlenses; microscope projection lithography; composed lenses; capped cavities
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-58425DOI: 10.1016/j.proche.2009.07.194ISI: 000275995600330OAI: oai:DiVA.org:liu-58425DiVA: diva2:343198
Available from: 2010-08-12 Created: 2010-08-11 Last updated: 2015-06-01

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Preechaburana, PakornFilippini, Daniel

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf