Oxygen incorporation in Ti2AlC thin films
2008 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 92, no 6, 064102- p.Article in journal (Refereed) Published
Thin films of Ti2AlC MAX phase have been deposited using a multiple cathode pulsed cathodic arc. Evidence for substantial oxygen incorporation in the MAX phase is presented, likely originating from residual gas present in the vacuum chamber during deposition. The characteristic MAX phase crystal structure is maintained, in agreement with ab initio calculations, supporting substitutional O in C lattice positions. On the basis of these results, we propose the existence of a MAX phase-like material with material properties tuned by the incorporation of oxygen. Additionally, possible unintentional O incorporation in previously reported MAX phase materials is suggested.
Place, publisher, year, edition, pages
American Institute of Physics , 2008. Vol. 92, no 6, 064102- p.
Medical and Health Sciences
IdentifiersURN: urn:nbn:se:liu:diva-59695DOI: 10.1063/1.2838456ISI: 000253237900121OAI: oai:DiVA.org:liu-59695DiVA: diva2:353011