Charge state dependence of cathodic vacuum arc ion energy and velocity distributions
2006 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 89, no 14, 141502- p.Article in journal (Refereed) Published
In the literature, conflicting conclusions are reported concerning the charge state dependence of cathodic arc ion energy and velocity distributions. It appears that data from electrostatic energy analyzers indicate charge state dependence of ion energy, whereas time-of-flight methods support charge state independence of ion velocity. Here the authors present charge-state-resolved ion energy distributions and calculate the corresponding ion velocity distributions in aluminum vacuum arc plasma. They show that the conflicting conclusions reported in the literature for the two different characterization techniques may originate from the commonly employed data interpretation of energy and velocity, in which peak values and average values are not carefully distinguished.
Place, publisher, year, edition, pages
American Institute of Physics , 2006. Vol. 89, no 14, 141502- p.
Medical and Health Sciences
IdentifiersURN: urn:nbn:se:liu:diva-59688DOI: 10.1063/1.2361197ISI: 000241056900029OAI: oai:DiVA.org:liu-59688DiVA: diva2:353073