liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Influence of argon and oxygen on charge-state-resolved ion energy distributions of filtered aluminum arcs
Rhein Westfal TH Aachen.
Lawrence Berkeley National Laboratory.
Rhein Westfal TH Aachen.
Rhein Westfal TH Aachen.
Show others and affiliations
2006 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 99, no 12, 123303- p.Article in journal (Refereed) Published
Abstract [en]

The charge-state-resolved ion energy distributions (IEDs) in filtered aluminum vacuum arc plasmas were measured and analyzed at different oxygen and argon pressures in the range of 0.5-8.0 mTorr. A significant reduction of the ion energy was detected as the pressure was increased, most pronounced in an argon environment and for the higher charge states. The corresponding average charge state decreased from 1.87 to 1.0 with increasing pressure. The IEDs of all metal ions in oxygen were fitted with shifted Maxwellian distributions. The results show that it is possible to obtain a plasma composition with a narrow charge-state distribution as well as a narrow IED. These data may enable tailoring thin film properties through selecting growth conditions that are characterized by predefined charge state and energy distributions.

Place, publisher, year, edition, pages
American Institute of Physics , 2006. Vol. 99, no 12, 123303- p.
National Category
Medical and Health Sciences
URN: urn:nbn:se:liu:diva-59686DOI: 10.1063/1.2206413ISI: 000238730000018OAI: diva2:353075
Available from: 2010-09-23 Created: 2010-09-23 Last updated: 2010-09-23

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Rosen, Johanna
In the same journal
Journal of Applied Physics
Medical and Health Sciences

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 151 hits
ReferencesLink to record
Permanent link

Direct link