Influence of argon and oxygen on charge-state-resolved ion energy distributions of filtered aluminum arcs
2006 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 99, no 12, 123303- p.Article in journal (Refereed) Published
The charge-state-resolved ion energy distributions (IEDs) in filtered aluminum vacuum arc plasmas were measured and analyzed at different oxygen and argon pressures in the range of 0.5-8.0 mTorr. A significant reduction of the ion energy was detected as the pressure was increased, most pronounced in an argon environment and for the higher charge states. The corresponding average charge state decreased from 1.87 to 1.0 with increasing pressure. The IEDs of all metal ions in oxygen were fitted with shifted Maxwellian distributions. The results show that it is possible to obtain a plasma composition with a narrow charge-state distribution as well as a narrow IED. These data may enable tailoring thin film properties through selecting growth conditions that are characterized by predefined charge state and energy distributions.
Place, publisher, year, edition, pages
American Institute of Physics , 2006. Vol. 99, no 12, 123303- p.
Medical and Health Sciences
IdentifiersURN: urn:nbn:se:liu:diva-59686DOI: 10.1063/1.2206413ISI: 000238730000018OAI: oai:DiVA.org:liu-59686DiVA: diva2:353075