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Charge-state-resolved ion energy distributions of aluminum vacuum arcs in the absence and presence of a magnetic field
RWTH, Aachen, Germany.
Lawrence Berkeley Laboratory.
RWTH, Aachen, Germany.
RWTH, Aachen, Germany.
2005 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 97, no 10, 103306- p.Article in journal (Refereed) Published
Abstract [en]

The charge-state-resolved ion energy distributions (IEDs) of aluminum vacuum are plasma species were measured and analyzed for different geometric and magnetic field configurations. The IEDs were fitted by shifted Maxwellian distributions. Plasma expansion in the absence of a magnetic field showed higher ion energies for higher charge states. The introduction of a magnetic field (independent of geometric configuration) resulted in a broader distribution and increased average ion energies. The energy gain was approximately proportional to the charge state, which may be due to the presence of electric fields in the magnetized plasma. The evolution of ion energy distributions is relevant to thin-film growth, and it is shown that the IEDs can be modified by suitable magnetic field configurations.

Place, publisher, year, edition, pages
American Institute of Physics , 2005. Vol. 97, no 10, 103306- p.
National Category
Medical and Health Sciences
URN: urn:nbn:se:liu:diva-59679DOI: 10.1063/1.1906291ISI: 000230168100020OAI: diva2:353086
Available from: 2010-09-23 Created: 2010-09-23 Last updated: 2010-09-23

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Rosen, Johanna
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ReferencesLink to record
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