Fabrication and packaging of integrated chemo-optical sensors
1996 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, Vol. 35, no 1-3, 234-240 p.Article in journal (Refereed) Published
This paper describes the design and fabrication of a sensitive integrated chemo-optical sensor supplied with on-chip fiber-to-waveguide connectors. The sensor is designed for TE-polarized light with wavelength of 633 nm. The fiber-to-chip connectors are based on easily fabricated silicon V-grooves combined with a smooth sawcut. The sawcut is defining the channel waveguide endface. The sensor is based on a phase modulated Mach-Zehnder interferometer, using the electro-optic effect of the waveguiding material zinc oxide (ZnO). The fiber-to-chip connector units have a typical coupling efficiency of 0.1–1%. The electro-optical voltage × length product Vπ is 15 ± 4 V cm at frequencies above 100 Hz. Preliminary experiments on the general (passive) sensor response showing its expected high sensitivity are discussed.
Place, publisher, year, edition, pages
1996. Vol. 35, no 1-3, 234-240 p.
Chemo-optical sensor; Zinc oxide (ZnO); Electro-optic; Phase modulation; Mach-Zehnder interferometer; Fiber-to-chip coupling
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-60380DOI: 10.1016/S0925-4005(97)80061-5OAI: oai:DiVA.org:liu-60380DiVA: diva2:356520