Actuator systems based on conducting polymers, such as polypyrole, with which three-dimensional movement can be controlled, are described. The Figure shows a combination of two such microactuators which are used to “kick” a glass bead across the surface of a silicon wafer. The microfabrication methods used to produce the systems are described and the potential uses, for example microrobotic arms, discussed.
DOI enligt publikationen fungerar ej:
10.1002/1521-4095(200101)13:1<76::AID-ADMA76>3.0.CO;2-I