Spinodal Decomposition of Ti0.33Al0.67N Thin Films Studied by Atom Probe Tomography
(English)Manuscript (preprint) (Other academic)
The decomposition of Ti0.33Al0.67N thin films deposited by cathodic arc evaporation have been studied by atom probe tomography. As-deposited films were found to deviate slightly from a random solid solution, and so be in the earliest stage of decomposition. After annealing at 900 °C for 2 h the films exhibited a spinodally decomposed nanostructure, in an intermediate stage. N was found to preferentially segregate to the Al-rich domains in the annealed sample, causing the TiN-domains to be understoichiometric. A possible Kirkendall effect was detected for the annealed sample, with a modulation of the local stoichiometry by 1-2 at. % along the decomposition gradient.
thin films, TiAlN, cathodic arc evaporation, atom probe tomography, spinodal decomposition
IdentifiersURN: urn:nbn:se:liu:diva-60524OAI: oai:DiVA.org:liu-60524DiVA: diva2:357187