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Defects in low-energy electron-irradiated n-type 4H-SiC
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.ORCID iD: 0000-0002-2597-3322
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.ORCID iD: 0000-0002-7171-5383
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.ORCID iD: 0000-0001-5768-0244
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2010 (English)In: Physica Scripta, vol. T141, IOP Publishing , 2010, 014006- p.Conference paper, Published paper (Refereed)
Abstract [en]

The bistable M-center, previously observed in high-energy proton-implanted 4H-SiC, was detected in low-energy electron-irradiated 4H-SiC using deep-level transient spectroscopy (DLTS). Irradiation increased the DLTS signals of the intrinsic defects Z(1/2) and EH6/7 and introduced the frequently observed defects EH1 and EH3. After the M-center is annealed out at about 650K without bias and at about 575K with bias applied to the sample during the annealing process, a new bistable defect in the low temperature range of the DLTS spectrum, the EB-center, evolves. Since low-energy irradiation affects mainly the carbon atoms in SiC, the M-center and the newly discovered EB-center are most probably carbon-related intrinsic defects.

Place, publisher, year, edition, pages
IOP Publishing , 2010. 014006- p.
Series
Physica Scripta, ISSN 0031-8949
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-62777DOI: 10.1088/0031-8949/2010/T141/014006ISI: 000284694500007OAI: oai:DiVA.org:liu-62777DiVA: diva2:374366
Conference
NMR 2009
Available from: 2010-12-03 Created: 2010-12-03 Last updated: 2015-09-22

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Beyer, FranziskaHemmingsson, CarlPedersen, HenrikHenry, AnneJanzén, Erik

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Beyer, FranziskaHemmingsson, CarlPedersen, HenrikHenry, AnneJanzén, Erik
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