liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
XPS depth profiling of laser-annealed Zn+-implanted GaAs
Bulgarian Academy of Sciences, Sofia.
Bulgarian Academy of Sciences, Sofia.
Bulgarian Academy of Sciences, Sofia.
Universita ‘‘La Sapienza'', Rome.
Show others and affiliations
1997 (English)In: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 109/110, 80-86 p.Article in journal (Refereed) Published
Abstract [en]

Data on the effects of 140 keV Zn+-implantation in (100) GaAs and the consequent low power pulsed laser annealing (LPPLA) on the As/Ga ratio and the chemical states of the elements at the surface and in the subsurface region are presented. The results include the depth distribution of the elements for virgin, as-implanted and implanted+LPPLA [30×(4.5/7.5) MW/cm2] samples. The X-ray photoelectron spectra of as-implanted samples show that a low-intensity Zn 2p peak is observed after 20 min of Ar+ sputtering with an energy of 3 keV, corresponding to about 20 nm of etched material. The depth profiling XPS analysis confirms the ‘recovering' of the stoichiometry of Zn+-implanted specimens after LPPLA with laser pulses of a power density in the energy window of (5–7 MW/cm2). At laser pulse power densities outside of this energy window (4.5 and 7.5 MW/cm2) Zn appears again in the XP spectra after 20 min sputtering as in the case of as-implanted GaAs.

Place, publisher, year, edition, pages
1997. Vol. 109/110, 80-86 p.
National Category
Natural Sciences
URN: urn:nbn:se:liu:diva-62923DOI: 10.1016/S0169-4332(96)00744-1OAI: diva2:375124
Available from: 2010-12-07 Created: 2010-12-07 Last updated: 2011-01-11

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Kakanakova-Georgieva, Anelia
In the same journal
Applied Surface Science
Natural Sciences

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 9 hits
ReferencesLink to record
Permanent link

Direct link