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Growth and characterization of epitaxial ultra-thin NbN films on 3C-SiC/Si substrate for terahertz applications
Chalmers University .
Chalmers University .
Chalmers University .
Chalmers University .
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2011 (English)In: Superconductors Science and Technology, ISSN 0953-2048, E-ISSN 1361-6668, Vol. 24, no 3, 035016- p.Article in journal (Refereed) Published
Abstract [en]

We report on electrical properties and microstructure of epitaxial thin NbN films grown on 3C-SiC/Si substrates by means of reactive magnetron sputtering. A complete epitaxial growth at the NbN/3C-SiC interface has been confirmed by means of high resolution transmission electron microscopy (HRTEM) along with x-ray diffractometry (XRD). Resistivity measurements of the films have shown that the superconducting transition onset temperature (TC) for the best specimen is 11.8 K. Using these epitaxial NbN films, we have fabricated submicron-size hot-electron bolometer (HEB) devices on 3C-SiC/Si substrate and performed their complete DC characterization. The observed critical temperature TC = 11.3 K and critical current density of about 2.5 MA  cm − 2 at 4.2 K of the submicron-size bridges were uniform across the sample. This suggests that the deposited NbN films possess the necessary homogeneity to sustain reliable hot-electron bolometer device fabrication for THz mixer applications.

Place, publisher, year, edition, pages
IOP , 2011. Vol. 24, no 3, 035016- p.
National Category
Natural Sciences
URN: urn:nbn:se:liu:diva-64537DOI: 10.1088/0953-2048/24/3/035016ISI: 000286422600017OAI: diva2:392446
Available from: 2011-01-27 Created: 2011-01-27 Last updated: 2014-10-08

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Henry, AnneJanzén, Erik
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Semiconductor MaterialsThe Institute of Technology
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