Standard-free composition measurements of Alx In1–xN by low-loss electron energy loss spectroscopy
2011 (English)In: physica status solidi (RRL) – Rapid Research Letters, ISSN 1862-6270, Vol. 5, no 2, 50-52 p.Article in journal (Refereed) Published
We demonstrate a standard-free method to retrieve compositional information in Alx In1–xN thin films by measuring the bulk plasmon energy (Ep), employing electron energy loss spectroscopy (EELS) in a scanning transmission electron microscope (STEM). Two series of samples were grown by magnetron sputter epitaxy (MSE) and metal organic vapor phase epitaxy (MOVPE), which together cover the full com- positional range 0 ≤ x ≤ 1. Complementary compositional measurements were obtained using Rutherford backscattering spectroscopy (RBS) and the lattice parameters were obtained by X-ray diffraction (XRD). It is shown that Ep follows a linear relation with respect to composition and lattice parameter between the alloying elements from AlN to InN allowing for straightforward compositional analysis.
Place, publisher, year, edition, pages
Wiley , 2011. Vol. 5, no 2, 50-52 p.
AlInN;low-loss EELS;thin films;compositional analysis
IdentifiersURN: urn:nbn:se:liu:diva-65816DOI: 10.1002/pssr.201004407ISI: 000288178300002OAI: oai:DiVA.org:liu-65816DiVA: diva2:399168
This is the pre-peer reviewed version of the following article:
Justinas Palisaitis, Ching-Lien Hsiao, Muhammad Junaid, Mengyao Xie, Vanya Darakchieva, Jean-Francois Carlin, Nicolas Grandjean, Jens Birch, Lars Hultman and Per O.Å. Persson, Standard-free composition measurements of AlxIn1-xN by low-loss electron energy loss spectroscopy, 2011, physica status solidi (RRL) – Rapid Research Letters, (5), 2, 50-52.