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Measurement of internal current densities during a HiPIMS discharge with a Rogowski coil
Linköping University, Department of Physics, Chemistry and Biology.
2011 (English)Independent thesis Advanced level (degree of Master (One Year)), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

In this study, the current densities in three different directions (r, φ and z) have been measured above the target during a HiPIMS discharge by the use of a Rogowski coil. This was done to examine the key transport parameter Jφ/JD┴ = ωge TEFF throughout the whole measured area, which is a key parameter describing how electrons are transported across magnetic field lines. The coil was adapted to the certain plasma environment that is present during a HiPIMS discharge in consideration due to the extreme environment that is present during the experiment. The thin film deposition system, where the measurements were performed, had a background pressure of ~10-6Torr and during the discharges the chamber were filled with an Ar to the partial pressure of 3mTorr. The previously reported anomalous fast transport of charged particles was verified and the faster-than-Bohm cross-B transport was found to be present in the chamber during the whole discharge but occupying a diminishing area closer to pulse turn off.

Place, publisher, year, edition, pages
2011. , 61 p.
Keyword [en]
HiPIMS, HPPMS, plasma, electron transport, Rogowski coil
National Category
Natural Sciences
URN: urn:nbn:se:liu:diva-69587ISRN: LiTH-IFM-A-EX--11/2495--SEOAI: diva2:429310
Subject / course
Applied Physics
Physics, Chemistry, Mathematics
Available from: 2011-07-04 Created: 2011-07-04 Last updated: 2011-07-04Bibliographically approved

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