Annealing behavior of the EB-centers and M-center in low-energy electron irradiated n-type 4H-SiC
2011 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 109, no 10, 103703- p.Article in journal (Refereed) Published
After low-energy electron irradiation of epitaxial n-type 4H-SiC with a dose of 5 x 10(16) cm(-2), the bistable M-center, previously reported in high-energy proton implanted 4H-SiC, is detected in the deep level transient spectroscopy (DLTS) spectrum. The annealing behavior of the M-center is confirmed, and an enhanced recombination process is suggested. The annihilation process is coincidental with the evolvement of the bistable EB-centers in the low temperature range of the DLTS spectrum. The annealing energy of the M-center is similar to the generation energy of the EB-centers, thus partial transformation of the M-center to the EB-centers is suggested. The EB-centers completely disappeared after annealing temperatures higher than 700 degrees C without the formation of new defects in the observed DLTS scanning range. The threshold energy for moving Si atom in SiC is higher than the applied irradiation energy, and the annihilation temperatures are relatively low, therefore the M-center, EH1 and EH3, as well as the EB-centers are attributed to defects related to the C atom in SiC, most probably to carbon interstitials and their complexes.
Place, publisher, year, edition, pages
American Institute of Physics , 2011. Vol. 109, no 10, 103703- p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-69907DOI: 10.1063/1.3586042ISI: 000292115900079OAI: oai:DiVA.org:liu-69907DiVA: diva2:433237
Franziska Beyer, Carl Hemmingsson, Henrik Pedersen, Anne Henry, Erik Janzén, J. Isoya, N. Morishita and T. Ohshima, Annealing behavior of the EB-centers and M-center in low-energy electron irradiated n-type 4H-SiC, 2011, Journal of Applied Physics, (109), 10, 103703.
Copyright: American Institute of Physics