Ti-B-C nanocomposite coatings deposited by magnetron sputtering
(English)Manuscript (preprint) (Other academic)
Ti-B-C nanocomposite coatings with a B content of 7-16 at.%, have been deposited by magnetron sputtering from B4C, Ti, and C targets. X-ray diffraction, photoelectron spectroscopy, and electron microscopy show that the coatings consist of nanocrystalline (nc) TiC:B embedded in a matrix of amorphous (a) BCx and C. The fraction of amorphous phase scales with the Ti concentration, where the matrix predominantly consists of free C with some BCx in coatings with 8 at.% B, while the matrix predominantly consists of BCx with some free C in coatings with 16 at.% B. Nc-TiC:B/a-BCx/a-C coatings with low amount of free C exhibit a contact resistance comparable to the contact resistance of an Ag sputtered coating at loads of ~1 N against an Au probe.
Nanocrystalline; Electron microscopy; Contact resistance; B4C; TiC
IdentifiersURN: urn:nbn:se:liu:diva-72226OAI: oai:DiVA.org:liu-72226DiVA: diva2:458503