Platinum zone plates for hard X-ray applications
2011 (English)In: Microelectronic Engineering, ISSN 0167-9317, Vol. 88, no 10, 3123-3126 p.Article in journal (Refereed) Published
We describe the fabrication and evaluation of platinum zone plates for 5-12 kV X-ray imaging and focusing. These nano-scale circular periodic structures are fabricated by filling an e-beam generated mold with Pt in an electroplating process. The plating recipe is described. The resulting zone plates, having outer zone widths of 100 and 50 nm, show good uniformity and high aspect ratio. Their diffraction efficiencies are 50-70% of the theoretical, as measured at the European Synchrotron Radiation Facility. Platinum shows promise to become an attractive alternative to present hard X-ray zone plate materials due to its nano-structuring properties and the potential for zone-plate operation at higher temperatures.
Place, publisher, year, edition, pages
Elsevier , 2011. Vol. 88, no 10, 3123-3126 p.
Zone plate; Pt electroplating; X-ray optics; Electron beam lithography
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-73345DOI: 10.1016/j.mee.2011.06.011ISI: 000297400900014OAI: oai:DiVA.org:liu-73345DiVA: diva2:471381