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Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films
Uppsala University.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
Uppsala University.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
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2011 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 206, no 6, 1033-1036 p.Article in journal (Refereed) Published
Abstract [en]

Al(1-x)B(x)N films of the wurtzite structure and a strong c-axis texture have been grown at room temperature by reactive sputter deposition with B concentrations of up to 10 at.%. The crystallographic structure of the films has been studied with XRD and HRTEM/SAED with stoichiometry and chemical bonding determined by XPS. Nanoindentation experiments show that the films have a hardness in excess of 30 GPa, which is retained after annealing for 1 h at 1000 degrees C. An amorphous phase is observed at the interface, the thickness of which increases with the B concentration in the film, while the film crystallinity is seen to improve with film thickness.

Place, publisher, year, edition, pages
Elsevier , 2011. Vol. 206, no 6, 1033-1036 p.
Keyword [en]
Aluminum boron nitride; Wurtzite; Single phase; Hardness; c-texture
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-73309DOI: 10.1016/j.surfcoat.2011.07.028ISI: 297825600001OAI: oai:DiVA.org:liu-73309DiVA: diva2:472107
Available from: 2012-01-03 Created: 2012-01-02 Last updated: 2017-12-08

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Birch, JensHultman, Lars

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