liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Morphology of TiN thin films grown on SiO(2) by reactive high power impulse magnetron sputtering
University of Iceland.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
University of Iceland.
University of Iceland.
Show others and affiliations
2011 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 520, no 5, 1621-1624 p.Article in journal (Refereed) Published
Abstract [en]

Thin TiN films were grown on SiO(2) by reactive high power impulse magnetron sputtering (HiPIMS) at a range of temperatures from 45 to 600 degrees C. The film properties were compared to films grown by conventional dc magnetron sputtering (dcMS) at similar conditions. Structural characterization was carried out using X-ray diffraction and reflection methods. The HiPIMS process produces denser films at lower growth temperature than does dcMS. Furthermore, the surface is much smoother for films grown by the HiPIMS process. The [200] grain size increases monotonically with increased growth temperature, whereas the size of the [111] oriented grains decreases to a minimum for a growth temperature of 400 degrees C after which it starts to increase with growth temperature. The [200] crystallites are smaller than the [111] crystallites for all growth temperatures. The grain sizes of both orientations are smaller in HiPIMS grown films than in dcMS grown films.

Place, publisher, year, edition, pages
Elsevier , 2011. Vol. 520, no 5, 1621-1624 p.
Keyword [en]
Titanium nitride, High power impulse magnetron sputtering, Ion-assisted deposition, Thin films
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-74859DOI: 10.1016/j.tsf.2011.07.041ISI: 000299233000048OAI: diva2:496538
Funding Agencies|University of Iceland|072105003|Available from: 2012-02-10 Created: 2012-02-10 Last updated: 2012-02-15

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Ingason, Arni Sigurdur
By organisation
Department of Physics, Chemistry and BiologyThe Institute of Technology
In the same journal
Thin Solid Films
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 29 hits
ReferencesLink to record
Permanent link

Direct link