Vacuum technology applied to solid state chemical sensors, processing, characterization and applications
2012 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 86, no 5, 488-494 p.Article in journal (Refereed) Published
This chapter will review several solid state chemical sensors with focus on the importance of ultra high vacuum, UHV, for the development of this area. Examples of sensors will be given where processing of sensors and sensing layers as well as characterization of chemical sensors takes place in UHV as well as examples of sensors for operation in UHV. Applications of chemical sensors both already commercialized and still on the research level will be given. Sensor technologies will span from metal oxide sensors, field effect transistor sensors to surface plasmon resonance, SPR, sensors and microcalorimeters. Examples of new challenging novel sensor approaches like sensors based on indirect SPR sensing and ultra sensitive graphene-based sensors for NO2 detection will also be given.
Place, publisher, year, edition, pages
Elsevier , 2012. Vol. 86, no 5, 488-494 p.
Solid state sensors, FET sensors, Metal oxide sensors, Surface plasmon resonance, Impedance sensors, Microcalorimeters, Graphene-based sensors
IdentifiersURN: urn:nbn:se:liu:diva-75727DOI: 10.1016/j.vacuum.2011.08.013ISI: 000300333800002OAI: oai:DiVA.org:liu-75727DiVA: diva2:508705
Funding Agencies|VINN Excellence Center in Research and Innovation on Functional Nanoscale Materials (FunMat) by the Swedish Governmental Agency for Innovation Systems and Industry||The Swedish Research Council|VR 621-2008-3229|2012-03-092012-03-092014-01-09