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Argon metastables in HiPIMS: time-resolved tunable diode-laser diagnostics
University of Paris 11.
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, The Institute of Technology.
University of Paris 11.
Royal Institute of Technology.
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2012 (English)In: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 21, no 2, 025010- p.Article in journal (Refereed) Published
Abstract [en]

Time-resolved tunable diode-laser absorption spectroscopy measurements were performed on the argon metastable (Ar-m) level 3s(2)3p(5)(P-2(3/2)degrees)4s excited at 801.478 nm, in the dense plasma region in front of the magnetron target in a high power impulse magnetron sputtering (HiPIMS) discharge. From the Doppler profile the evolution of the temperature and density was derived during the pulse as well as during the plasma decay, i.e. in the afterglow. It is shown that the Ar-m density sharply increases at the beginning of the discharge pulse, followed by a severe Ar-m depletion along with increasing gas temperature around the peak of the HiPIMS discharge current. The strong dynamics of these parameters involve many elementary processes such as electron-impact excitation, electron-impact de-excitation and ionization of Ar-m, gas rarefaction, electron temperature increase at the end of the pulse and gas diffusion. These phenomena are discussed with respect to several parameters: distance from the target, peak discharge current during the pulse, pulse length, and gas pressure.

Place, publisher, year, edition, pages
Institute of Physics , 2012. Vol. 21, no 2, 025010- p.
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-77335DOI: 10.1088/0963-0252/21/2/025010ISI: 000302779400024OAI: diva2:526321
Funding Agencies|IDEI of the PNCDI|540/2009|Swedish Research Council||Swedish Foundation for Strategic Research||European Collaboration in Science and Technology (COST Action)|MP0804|Available from: 2012-05-11 Created: 2012-05-11 Last updated: 2012-06-28

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