Spinodal decomposition of Ti0.33Al0.67N thin films studied by atom probe tomography
2012 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 520, no 13, 4362-4368 p.Article in journal (Refereed) Published
Details of the phase decomposition in NaCl-structure Ti0.33Al0.67N thin films deposited by cathodic arc evaporation are studied by atom probe tomography. We demonstrate that as-deposited films are in the earliest stage of decomposition for which electron microscopy and x-ray diffraction indicate a single-phase solid solution. Annealing at 900 degrees C further activates spinodal decomposition of the films, although pockets of unde-composed material remain after 2 h. N preferentially segregates to the AlN and TiN domains, causing the TiAlN matrix to be understoichiometric, by the energetics of N vacancies in TiAlN. The corresponding modulation in stoichiometry implies a Kirkendall effect, caused by different Al and Ti diffusivities.
Place, publisher, year, edition, pages
Elsevier, 2012. Vol. 520, no 13, 4362-4368 p.
Titanium aluminum nitride, Spinodal decomposition, Atom probe tomography, Thin films
IdentifiersURN: urn:nbn:se:liu:diva-77325DOI: 10.1016/j.tsf.2012.02.085ISI: 000303084200023OAI: oai:DiVA.org:liu-77325DiVA: diva2:526344
Funding Agencies|Swedish Research Council||VINN Excellence Center on Functional Nanoscale Materials||2012-05-112012-05-112016-08-31Bibliographically approved