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New method for selectivity enhancement of SiC field effect gas sensors for quantification of NO (x)
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics. Linköping University, The Institute of Technology.
University of Saarland, Germany .
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics. Linköping University, The Institute of Technology.ORCID iD: 0000-0002-2817-3574
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2012 (English)In: Microsystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems, ISSN 0946-7076, E-ISSN 1432-1858, Vol. 18, no 7-8, 1015-1025 p.Article in journal (Refereed) Published
Abstract [en]

A silicon carbide based enhancement type metal insulator field effect transistor with porous gate metallization has been investigated as a total NO (x) sensor operated in a temperature cycling mode. This operating mode is quite new for gas sensors based on the field effect but promising results have been reported earlier. Based on static investigations we have developed a suitable T-cycle optimized for NO (x) detection and quantification in a mixture of typical exhaust gases (CO, C2H4, and NH3). Significant features describing the shape of the sensor response have been extracted and evaluated with multivariate statistics (e.g. linear discriminant analysis) allowing quantification of NO (x) . Additional cleaning-cycles every 30 min improve the stability of the sensor further. With this kind of advanced signal processing the influence of sensor drift and cross sensitivity to ambient gases can be reduced effectively. Measurements have proven that different concentrations of NO (x) can be detected even in a changing mixture of other typical exhaust gases under dry and humid conditions. In addition to that, unknown concentrations of NO (x) can be detected based on a small set of training data. It can be concluded that the performance of GasFETs for NO (x) determination can be enhanced considerably with temperature cycling and appropriate signal processing.

Place, publisher, year, edition, pages
Springer Verlag (Germany) , 2012. Vol. 18, no 7-8, 1015-1025 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-79663DOI: 10.1007/s00542-012-1434-zISI: 000305691500022OAI: oai:DiVA.org:liu-79663DiVA: diva2:544299
Available from: 2012-08-14 Created: 2012-08-13 Last updated: 2017-12-07

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Bur, ChristianAndersson, MikeLloyd Spetz, Anita

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