liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
A novel high-power pulse PECVD method
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.ORCID iD: 0000-0002-7171-5383
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Show others and affiliations
2012 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 206, no 22, p. 4562-4566Article in journal (Refereed) Published
Abstract [en]

A novel plasma enhanced CVD (PECVD) technique has been developed in order to combine energetic particle bombardment and high plasma densities found in ionized PVD with the advantages from PECVD such as a high deposition rate and the capability to coat complex and porous surfaces. In this PECVD method, an ionized plasma is generated above the substrate by means of a hollow cathode discharge. The hollow cathode is known to generate a highly ionized plasma and the discharge can be sustained in direct current (DC) mode, or in high-power pulsed (HiPP) mode using short pulses of a few tens of microsecond. The latter option is similar to the power scheme used in high power impulse magnetron sputtering (HiPIMS), which is known to generate a high degree of ionization of the sputtered material, and thus providing new and added means for the synthesis of tailor-made thin films. In this work amorphous carbon coatings containing copper, have been deposited using both HiPP and DC operating conditions. Investigations of the bulk plasma using optical emission spectroscopy verify the presence of Ar+, C+ as well as Cu+ when running in pulsed mode. Deposition rates in the range 30 mu m/h have been obtained and the amorphous, copper containing carbon films have a low hydrogen content of 4- 5 at%. Furthermore, the results presented here suggest that a more efficient PECVD process is obtained by using a superposition of HiPP and DC mode, compared to using only DC mode at the same average input power.

Place, publisher, year, edition, pages
Elsevier , 2012. Vol. 206, no 22, p. 4562-4566
Keywords [en]
PECVD, Hollow cathode, Pulsed plasma discharges, Amorphous carbon
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-81223DOI: 10.1016/j.surfcoat.2012.05.007ISI: 000306350600011OAI: oai:DiVA.org:liu-81223DiVA, id: diva2:551053
Note

Funding Agencies|Swedish Innovation Agency (VINNOVA) and Angpanneforeningens forskningsstiftelse (AForsk)||

Available from: 2012-09-10 Created: 2012-09-10 Last updated: 2020-11-16

Open Access in DiVA

fulltext(695 kB)2118 downloads
File information
File name FULLTEXT01.pdfFile size 695 kBChecksum SHA-512
36631c0be48b0a876f9a0a08e6d29e67963ffb118f310ba4d49a4dcc3a21cde739cf33586110506bf237d5f9a8308e2ea557037df0e4a741493f047a66481615
Type fulltextMimetype application/pdf

Other links

Publisher's full text

Authority records

Pedersen, HenrikLarsson, PetterJensen, JensLundin, Daniel

Search in DiVA

By author/editor
Pedersen, HenrikLarsson, PetterJensen, JensLundin, Daniel
By organisation
Semiconductor MaterialsThe Institute of TechnologyPlasma and Coating PhysicsDepartment of Physics, Chemistry and BiologyThin Film Physics
In the same journal
Surface & Coatings Technology
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
Total: 2118 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 400 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf