Ti-B-C nanocomposite coatings deposited by magnetron sputtering
2012 (English)In: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 258, no 24, 9907-9912 p.Article in journal (Refereed) Published
Ti-B-C nanocomposite coatings with a B content of 8-17 at.% have been deposited by magnetron sputtering from B4C, Ti, and C targets. X-ray diffraction, photoelectron spectroscopy, and electron microscopy show that the coatings consist of nanocrystalline (nc) TiC: B embedded in a matrix of amorphous (a) C, BCx, TiOx and BOx. The fraction of amorphous phase scales with the Ti concentration, where the matrix predominantly consists of free C with some BCx in coatings with a C/Ti ratio andgt; 1, while the matrix predominantly consists of BCx with some free C in coatings with a C/Ti ratio andlt; 1. nc-TiC:B/a-BCx/a-C coatings with low amount of free C exhibit a contact resistance comparable to the contact resistance of an Ag sputtered coating at loads of similar to 1 N against an Au probe, despite the O content of similar to 16 at.%.
Place, publisher, year, edition, pages
Elsevier , 2012. Vol. 258, no 24, 9907-9912 p.
Nanocrystalline, Electron microscopy, Contact resistance, B4C, TiC
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-81812DOI: 10.1016/j.apsusc.2012.06.049ISI: 000307729600064OAI: oai:DiVA.org:liu-81812DiVA: diva2:556874
Funding Agencies|VINNOVA VINN Excellence Centre in Research and Innovation on Functional Nanoscale Materials, Fun-Mat||2012-09-262012-09-242015-01-13