liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Face-Centered Cubic (Al1-xCrx)2O3 Thin Films: Deposition, Characterization, and Heat Treatment Studies
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
2011 (English)Conference paper, Presentation (Other academic)
Abstract [en]

Face centered cubic (Al1-xCrx)2O3 solid solution films, with x in the range 0.60<x<0.70, have been deposited using dual reactive RF magnetron sputtering from Al and Cr targets in mixed Ar/O2 discharge at a substrate temperature of 500 °C. The films have a strong <100> preferred orientation. The unit cell parameter is 4.04 Å determined by x-ray diffraction and high resolution transmission electron microscopy techniques. The (Al1-xCrx)2O3 films are suggested to have a non-stoichiometric NaCl structure with 33% vacancy occupancy on Al/Cr sites. Nanoindentation shows that the films exhibit hardness values up to 26 GPa and reduced modulus of 220-235 GPa. In the present work, ex-situ annealing studies were performed on as-deposited samples for a series of temperatures up to 1100 °C and annealing time of 2,4,6,8, and 10 hours. The fcc structure remains intact up to 950 °C. A gradual phase transformation from fcc to corundum at 925 °C is observed, where annealing for 2 h yields a partial transformation and annealing for >6 h results in complete transformation to a-(Al1-xCrx)2O3. There is no indication of any phase separation into a-Cr2O3 and Al2O3.

Place, publisher, year, edition, pages
National Category
Manufacturing, Surface and Joining Technology Physical Sciences
URN: urn:nbn:se:liu:diva-84378OAI: diva2:558845
12th Conference on the European Ceramic Society (ECerS XII), 19-23 June 2011, Stockholm, Sweden
Available from: 2012-10-05 Created: 2012-10-05 Last updated: 2012-10-11

Open Access in DiVA

No full text

Search in DiVA

By author/editor
Khatibi, Ali
By organisation
Thin Film PhysicsThe Institute of Technology
Manufacturing, Surface and Joining TechnologyPhysical Sciences

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 44 hits
ReferencesLink to record
Permanent link

Direct link