Phase transformations in Ti1xA1xN thin films
(English)Manuscript (preprint) (Other academic)
We report ageing phenomena in arc-deposited Ti1-xA1xN (0≤x≤0.66) thin films probed by X-ray diffraction, differential scanning calorimetry, four-point probe sheet resistance, and transmission electron microscopy measurements. Annealing Ti1-xA1xN films at 500-900°C results in residual stress recovery through annihilation of deposition-induced lattice defects, followed by spinodal decomposition at 900-1400°C into coherent nanometer-size domains of [NaCl]-TiN, and [NaCl]-AIN that eventually transform into the stable [wurtzite]-AIN phase. Kinetics measurements reveal activation energies of 2.0-2.9 eV for lattice recovery processes, and 2.9-3.5 eV for transformation processes, indicating grain boundary and defect-assisted segregation of Ti and Al. The composition was shown to have large influence on the thermal stability of Ti1-xA1xN films. The results show that the phase transformations are initiated at lower temperatures with increasing Al content.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-85660OAI: oai:DiVA.org:liu-85660DiVA: diva2:572395