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Comparison of Post-Growth Carrier Lifetime Improvement Methods for 4H-SiC Epilayers
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials. Linköping University, The Institute of Technology.
Royal Institute of Technology, Sweden.
University of Iceland, Reykjavik, Iceland.
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2012 (English)In: Materials Science Forum Vols 717 - 720, Trans Tech Publications Inc., 2012, Vol. 717-720, 285-288 p.Conference paper, Published paper (Refereed)
Abstract [en]

We compare two methods for post-growth improvement of bulk carrier lifetime in 4H-SiC: dry oxidations and implantations with either C-12 or N-14, followed by high temperature anneals in Ar atmosphere. Application of these techniques to samples cut from the same wafer/epilayer yields 2- to 11-fold lifetime increases, with the implantation/annealing technive shown to give greater rnaximum lifetimes. The maximum lifetimes reached are similar to 5 mu s after C-12 implantation at 600 degrees C and annealing in Ar for 180 minutes at 1500 degrees C. At higher annealing temperatures the lifetimes decreases, a result which differs from reports in the literature.

Place, publisher, year, edition, pages
Trans Tech Publications Inc., 2012. Vol. 717-720, 285-288 p.
Keyword [en]
Carrier lifetime; Implantation; Annealing; Oxidation; Photon counting
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-87573DOI: 10.4028/www.scientific.net/MSF.717-720.285ISI: 000309431000066OAI: oai:DiVA.org:liu-87573DiVA: diva2:589560
Conference
14th International Conference on Silicon Carbide and Related Materials (ICSCRM 2011), 11-16 September 2011, Cleveland, OH, USA
Available from: 2013-01-18 Created: 2013-01-18 Last updated: 2013-02-04

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Booker, Ian DonHassan, JawadKordina, OlleBergman, Peder

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
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Language
  • de-DE
  • en-GB
  • en-US
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  • sv-SE
  • Other locale
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Output format
  • html
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