liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Polymer membranes for modification of the selectivity of field-effect gas sensors
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics. Linköping University, The Institute of Technology.ORCID iD: 0000-0002-2817-3574
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Applied Physics. Linköping University, The Institute of Technology.
1992 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, E-ISSN 1873-3077, Vol. 7, no 1-3, 661-664 p.Article in journal (Refereed) Published
Abstract [en]

Polymer membranes are used to increase the selectivity to certain gases of metal silicon dioxide-semiconductor (MOS) structures. Other parameters which influence the selectivity of MOS structures are the type of gate metal, its microstructure (dense or porous) and the operating temperature of the device. Photoresists as membranes can be patterned by photolithographic methods. Membranes, 1-2-mu-m thick, of positive and negative photoresist are applied on MOS capacitors with 6 nm iridium as the gate metal, operated at 150-degrees-C. The influence of the membranes on the response to three gases, hydrogen, ammonia and ethanol, has been investigated. The hydrogen response decreases bv about half with the use of a photoresist membrane. The ammonia response shows a characteristic change in the kinetics, while the ethanol response almost disappears. Positive and negative resist influence the gas response in similar ways, in spite of their different molecular structures.

Place, publisher, year, edition, pages
Elsevier , 1992. Vol. 7, no 1-3, 661-664 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-88153DOI: 10.1016/0925-4005(92)80382-8ISI: A1992HT65800066OAI: oai:DiVA.org:liu-88153DiVA: diva2:602816
Available from: 2013-02-04 Created: 2013-01-30 Last updated: 2017-12-06

Open Access in DiVA

No full text

Other links

Publisher's full text

Authority records BETA

Spetz, AnitaWinquist, FredrikLundström, Ingemar

Search in DiVA

By author/editor
Spetz, AnitaWinquist, FredrikLundström, Ingemar
By organisation
Applied PhysicsThe Institute of Technology
In the same journal
Sensors and actuators. B, Chemical
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 196 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf