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Gas sensitive field effect devices for high temperature
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.ORCID iD: 0000-0002-2817-3574
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
1995 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, E-ISSN 1873-3077, Vol. 26, no 1-3, 165-169 p.Article in journal (Refereed) Published
Abstract [en]

Field effect sensors based on metal-oxide-silicon carbide (MOSiC) devices are used as high temperature gas sensors. They are sensitive to, for example, saturated hydrocarbons and hydrogen and can be operated up to at least 800 degrees C, which make them suitable for several types of combustion control. A metal gate with two layer platinum and a buffer layer of tantalum silicide in between gave a large increase in the long term stability of the sensors. At temperatures below 600 degrees C, the response to ethane in oxygen was shown to have a threshold at a ratio of about 0.38 for the ethane-to-oxygen concentrations. Below this ratio, the surface can be considered as mainly oxygen covered and the response is small. Above this ratio the metal surface is probably mainly hydrogen covered and the response is considerably larger.

Place, publisher, year, edition, pages
Elsevier, 1995. Vol. 26, no 1-3, 165-169 p.
Keyword [en]
Catalytic metal; MOS; Silicon carbide; Gas sensors; High temperature; Combustion control
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-88146DOI: 10.1016/0925-4005(94)01579-7ISI: A1995QW08300035OAI: oai:DiVA.org:liu-88146DiVA: diva2:602840
Available from: 2013-02-04 Created: 2013-01-30 Last updated: 2017-12-06

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Baranzahi, AmirLloyd Spetz, AnitaLundström, Ingemar

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