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Oxidation of Fluorinated Amorphous Carbon (a-CFx) Films
Carnegie Mellon University, Pittsburgh, USA.
Carnegie Mellon University, Pittsburgh, USA.ORCID iD: 0000-0003-3277-1945
Carnegie Mellon University, Pittsburgh and National Energy Technology Laboratory, Pittsburgh, Pennsylvania, USA.
2010 (English)In: Langmuir, ISSN 0743-7463, E-ISSN 1520-5827, Vol. 26, no 2, 908-914 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
American Chemical Society (ACS), 2010. Vol. 26, no 2, 908-914 p.
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Materials Engineering Physical Sciences
URN: urn:nbn:se:liu:diva-88526DOI: 10.1021/la902375fOAI: diva2:604679
Available from: 2013-02-11 Created: 2013-02-11 Last updated: 2013-11-13

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Broitman, Esteban
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