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Integrated direct DNA/protein patterning and microfabrication by focused ion beam milling
National University of Singapore .
WinTech Nano-Technology Services Pte. Ltd, Singapore.
National University of Singapore .ORCID iD: 0000-0003-3274-6029
National University of Singapore .
2008 (English)In: Advanced Materials, ISSN 0935-9648, E-ISSN 1521-4095, Vol. 20, no 9, 1636-1643 p.Article in journal (Refereed) Published
Abstract [en]

Single and binary component patterning and integrated microfabrication of biomolecules, such as DNA and proteins, can be achieved by focused ion-beam (FIB) biolithography. Well-defined micropatterns are obtained by FIB milling on biomolecules immobilized on SiO2 wafers and protected by a thin Au film. The retention of biofunctionality is excellent (68–90%) and a feature size of down to 500 nm can be achieved for the patterns without significant loss of functionality.

Place, publisher, year, edition, pages
John Wiley & Sons, 2008. Vol. 20, no 9, 1636-1643 p.
Keyword [en]
biomolecules; patterning; focused ion beam; microfabrication; microdevices; DNA
National Category
Nano Technology
URN: urn:nbn:se:liu:diva-92067DOI: 10.1002/adma.200701415OAI: diva2:620054
Available from: 2013-05-07 Created: 2013-05-07 Last updated: 2015-03-12Bibliographically approved

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Mak, Wing Cheung
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