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Gas Sensing Properties of Pulsed Laser Deposited Vanadium OxideThin Films with Various Crystal Structures
University of Oulu, Finland. (Microelectronics and Materials Physics Laboratories)
University of Oulu. (Microelectronics and Materials Physics Laboratories)
University of Oulu. (Microelectronics and Materials Physics Laboratories)
Linköping University, Department of Physics, Chemistry and Biology, Applied Sensor Science. Linköping University, The Institute of Technology.ORCID iD: 0000-0002-2817-3574
2013 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, Vol. 187, no SI, 386-394 p.Article in journal (Refereed) Published
Abstract [en]

Vanadium oxide thin films were fabricated by pulsed laser deposition. The crystal structure and symmetry of the deposited films were studied with X-ray diffraction and Raman spectroscopy, respectively. The film microstructure was also studied with atomic force microscopy and scanning electron microscopy. The thin film crystal structures varied between almost pure V2O5 phase and another phase, suggested being V7O16, generally found in samples composed of nanotubes and identified as VOx-NT. The measured optical transmission spectra of the films also supported the existence of two different phases. The electrical resistivity of the films as a function of temperature behaved like in a typical semiconductor. The gas sensing properties of the films were characterized for different NOx, CO and H-2 concentrations. The results showed a response to NOx and H-2, which varied from oxidative to reducing according to the film composition and gas background environment. Only very small response was seen towards CO. Gas response and resistivity measurements indicated that the VOx-NT-type phase has both n-type and p-type conduction mechanisms.

Place, publisher, year, edition, pages
Elsevier, 2013. Vol. 187, no SI, 386-394 p.
Keyword [en]
Vanadium oxides; V2O5; V7O16; Thin film; Resistivity change; Gas sensing; NOx; H2
National Category
Materials Engineering
URN: urn:nbn:se:liu:diva-92399DOI: 10.1016/j.snb.2012.12.067ISI: 000324298300059OAI: diva2:620736
Available from: 2013-05-10 Created: 2013-05-10 Last updated: 2014-01-09

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Lloyd Spetz, Anita
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Applied Sensor ScienceThe Institute of Technology
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