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Multi-Level Pseudo-Random Signal Design and 'Model-on-Demand' Estimation Applied to Nonlinear Identification of a RTP Wafer Reactor
Linköping University, Department of Electrical Engineering, Automatic Control. Linköping University, The Institute of Technology.
1999 (English)In: Preceedings of the 1999 American Control Conference, 1999, 1573-1579 vol.3 p.Conference paper, Published paper (Refereed)
Abstract [en]

Guidelines are presented for specifying the design parameters of multi-level pseudo-random sequences in a manner useful for “plant-friendly” nonlinear system identification. These multi-level signals are introduced into a rapid thermal processing wafer reactor simulation and compared against a well-designed pseudo-random binary sequence (PRBS). The resulting data serves as a database for a “model on demand” (MoD) predictor. MoD estimation is attractive because it requires less engineering effort to model a nonlinear plant, compared to global nonlinear models such as neural networks. The improved fit of multi-level signals over the PRBS signal, as well as the usefulness of the MoD estimator, is demonstrated on validation data.

Place, publisher, year, edition, pages
1999. 1573-1579 vol.3 p.
Keyword [en]
Identification, Local polynomial modeling, Nonlinear systems, Closed loop systems
National Category
Control Engineering
Identifiers
URN: urn:nbn:se:liu:diva-94082DOI: 10.1109/ACC.1999.786090ISBN: 0-7803-4990-3 (print)OAI: oai:DiVA.org:liu-94082DiVA: diva2:629982
Conference
1999 American Control Conference, San Diego, CA, USA, June, 1999
Available from: 2013-06-18 Created: 2013-06-16 Last updated: 2013-06-18

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CiteExportLink to record
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Citation style
  • apa
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