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A novel pulsed high-density plasma process for nanoparticle synthesis
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, The Institute of Technology.ORCID iD: 0000-0003-3767-225X
Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics. Linköping University, The Institute of Technology.
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2012 (English)In: Technical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012:  , 2012, 368-370 p.Conference paper, Published paper (Refereed)
Abstract [en]

This work presents a new technique to produce nanoparticles in a controlled manor using highly ionized plasmas that will ionize the source material [1]. The advantage of ionizing the source material is that it will increase the trapping onto negatively charged nanoparticles (NPs) that should result in a significant increase in productivity. In this work we have performed both simulations and experiments. The experiments were performed using high power impulses to generate high plasma densities. The dense plasma yields a high degree of ionization of the sputtered metal species. Solid metal cylinders of Cu, Ag, Ti and Mo were used as hollow cathodes for the synthesis of NPs. By tuning the process parameters, pulsing energy, pulsing frequency, etc., the particle size can range from of 5 nm to 700 nm in diameter.

Place, publisher, year, edition, pages
2012. 368-370 p.
Keyword [en]
Hollow cathode; Nanoparticle; Plasma; Pulsed power; Sputtering
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-101142OAI: oai:DiVA.org:liu-101142DiVA: diva2:665664
Conference
2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012, June 18-21, Santa Clara, CA
Available from: 2013-11-20 Created: 2013-11-19 Last updated: 2013-11-20

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Helmersson, UlfSöderström, DanielPilch, I.Pillay, Sankara

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