Synthesis of amorphous carbon thin films using acetylene-based high power impulse magnetron sputtering discharges
2013 (English)Manuscript (preprint) (Other academic)
Amorphous carbon (a-C) thin films are synthesized using high power impulse magnetron sputtering (HiPIMS) based Ne-Ar/C2H2 discharges. Plasma properties and film growth are investigated under different gas phase composition and operating pressures. Film mass densities, H content, hardness and compressive stresses are measured. Mass densities in the order of 2.2 g/cm3, hardness close to 25 GPa and H content as low as 11% are obtained. The film properties manifest a dependence on energy and flux of the depositing species and energetic ion bombardment driven structural changes in the films are found to govern the resulting film properties.
Place, publisher, year, edition, pages
Diamond-like carbon, hydrogenated amorphous carbon, HiPIMS, Reactive sputtering
IdentifiersURN: urn:nbn:se:liu:diva-104263OAI: oai:DiVA.org:liu-104263DiVA: diva2:696194