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Statistical Analysis of Process Variation Based on Indirect Measurements for Electronic System Design
Linköping University, Department of Computer and Information Science, ESLAB - Embedded Systems Laboratory. Linköping University, Department of Computer and Information Science, Software and Systems. Linköping University, The Institute of Technology.
Linköping University, Department of Computer and Information Science, Statistics. Linköping University, Faculty of Arts and Sciences.
Linköping University, Department of Computer and Information Science, ESLAB - Embedded Systems Laboratory. Linköping University, Department of Computer and Information Science, Software and Systems. Linköping University, The Institute of Technology.
Linköping University, Department of Computer and Information Science, ESLAB - Embedded Systems Laboratory. Linköping University, Department of Computer and Information Science, Software and Systems. Linköping University, The Institute of Technology.
2014 (English)In: 2014 19TH ASIA AND SOUTH PACIFIC DESIGN AUTOMATION CONFERENCE (ASP-DAC), New York: IEEE conference proceedings, 2014, 436-442 p.Conference paper, Published paper (Refereed)
Abstract [en]

We present a framework for the analysis of process variation across semiconductor wafers. The framework is capable of quantifying the primary parameters affected by process variation, e.g., the effective channel length, which is in contrast with the former techniques wherein only secondary parameters were considered, e.g., the leakage current. Instead of taking direct measurements of the quantity of interest, we employ Bayesian inference to draw conclusions based on indirect observations, e.g., on temperature. The proposed approach has low costs since no deployment of expensive test structures might be needed or only a small subset of the test equipments already deployed for other purposes might need to be activated. The experimental results present an assessment of our framework for a wide range of configurations.

Place, publisher, year, edition, pages
New York: IEEE conference proceedings, 2014. 436-442 p.
Series
Asia and South Pacific Design Automation Conference Proceedings, ISSN 2153-6961
National Category
Computer Science
Identifiers
URN: urn:nbn:se:liu:diva-106737DOI: 10.1109/ASPDAC.2014.6742930ISI: 000350791700081Scopus ID: 2-s2.0-84897898869ISBN: 978-1-4799-2816-3 (print)OAI: oai:DiVA.org:liu-106737DiVA: diva2:718364
Conference
19th Asia and South Pacific Design Automation Conference (ASP-DAC 2014), SunTec, Singapore, January 20-23, 2014
Available from: 2014-05-20 Created: 2014-05-20 Last updated: 2015-06-01Bibliographically approved

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Ukhov, IvanVillani, MattiasEles, PetruPeng, Zebo

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