Growth and Mechanical Behavior of Nanoscale Structures in ZrN/Zr0.63Al0.37N Multilayers
(English)Manuscript (preprint) (Other academic)
Structure and mechanical properties of monolithic and nanoscale multilayers of ZrN/Zr0.63Al0.37N are investigated as a function of Zr0.63Al0.37N layer thickness. ZrN/Zr0.63Al0.37N multilayers were deposited by reactive magnetron sputtering on MgO (001) substrates at a temperature of 700 °C. Monolithic Zr0.63Al0.37N film shows a chemically segregated nanostructure of cubic-ZrN and wurtzite-AlN rich domains with incoherent interfaces. Three dimensional atom probe measurements reveal comparable chemical segregation between monolithic and multilayer Zr0.63Al0.37N film. The multilayers show systematic changes in nanostructure as a function of Zr0.63Al0.37N layer thickness resulting in mechanical properties such as hardness and fracture resistance being tunable. A maximum hardness of 34 GPa is achieved with 10 nm Zr0.63Al0.37N layer thickness having semi-coherent interfaces between wurtzite-AlN and cubic-ZrN rich domains. Higher fracture resistance is achieved at 2nm Zr0.63Al0.37N where AlN rich domains are epitaxially stabilized in the metastable cubic phase.
IdentifiersURN: urn:nbn:se:liu:diva-106762OAI: oai:DiVA.org:liu-106762DiVA: diva2:718622