Characterization of Boron Nitride Thin Films
2013 (English)Conference paper (Refereed)
Rhombohedral Boron Nitride layers were grown on sapphire substrate in a hot-wall CVD reactor. The characterization of those layers is reported and the results are discussed in correlation with the various growth parameters used.
Place, publisher, year, edition, pages
IEEE , 2013. 1-2 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-106877DOI: 10.1109/CLEOPR.2013.6600222ISI: 000334176100311ISBN: 978-146736475-1OAI: oai:DiVA.org:liu-106877DiVA: diva2:719890
10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013; Kyoto; Japan