liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
A combinatorial investigation of sputtered Ta-Al-C thin films
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
University of Sydney, Australia .
University of Sydney, Australia .
2014 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 558, 99-103 p.Article in journal (Refereed) Published
Abstract [en]

We describe a combinatorial experiment investigating the Ta-Al-C material system, conducted with the aim of determining why the tantalum-containing M-n + (1)AX(n) phases have so far proved to be not amenable to thin-film synthesis. Samples were deposited onto (0001) Al2O3 wafers at 850 degrees C and characterized by X-ray diffraction wafer maps, scanning electron microscopy, and surface optical scattering. Elemental Ta, the binary phases TaC, Ta2C, and TaAl3, and the ternary phases Ta3Al2C and Ta5Al3C were identified. The morphology, phase composition and preferred orientation of the films deposited were found to be highly sensitive to the Ta fraction of the incident flux during deposition. No MAX phase material was observed, indicating that the Ta-containing MAX phases do not form under the deposition conditions investigated. Explanations associated with inadequate coverage of stochiometries, preferential sputtering, and thermodynamic instability have been ruled out. An explanation based on reduced surface diffusion of Ta during growth is proposed. A substantially higher substrate temperature during deposition is likely to be required to synthesize Ta-containing MAX phases.

Place, publisher, year, edition, pages
Elsevier , 2014. Vol. 558, 99-103 p.
Keyword [en]
MAX phase; Tantalum; Combinatorial
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-106826DOI: 10.1016/j.tsf.2014.02.086ISI: 000334314100014OAI: diva2:720208
Available from: 2014-05-28 Created: 2014-05-23 Last updated: 2014-05-28

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Tucker, Mark
By organisation
Thin Film PhysicsThe Institute of Technology
In the same journal
Thin Solid Films
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 26 hits
ReferencesLink to record
Permanent link

Direct link