Anomalous epitaxial stability of (001) interfaces in ZrN/SiNx multilayers
2014 (English)In: APL Materials, ISSN 2166-532X, Vol. 2, no 4, 046106- p.Article in journal (Refereed) Published
Isostructural stability of B1-NaCl type SiN on (001) and (111) oriented ZrN surfaces is studied theoretically and experimentally. The ZrN/SiNx/ZrN superlattices with modulation wavelength of 3.76 nm (dSiNx similar to 0.4 nm) were grown by dc-magnetron sputtering on MgO(001) and MgO(111). The results indicate that 0.4 nm thin SiNx layers utterly influence the preferred orientation of epitaxial growth: on MgO(001) cube-on-cube epitaxy of ZrN/SiNx superlattices were realized whereas multilayers on MgO(111) surface exhibited an unexpected 002 texture with a complex fourfold 90 degrees-rotated in-plane preferred orientation. Density functional theory calculations confirm stability of a (001) interface with respect to a (111) which explains the anomaly.
Place, publisher, year, edition, pages
American Institute of Physics , 2014. Vol. 2, no 4, 046106- p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-107456DOI: 10.1063/1.4870876ISI: 000336083600007OAI: oai:DiVA.org:liu-107456DiVA: diva2:724312